| 摘要 |
<p>PROBLEM TO BE SOLVED: To resolve measurement errors caused by the nonlinearity and temperature characteristic of a photoelectric current sensor while suppressing a cost increase. SOLUTION: A correction equation for linearly correcting the nonlinear output of a photoelectric current sensor 2 and a correction equation for correcting the temperature error characteristic of the photoelectric current sensor 2 are stored in a memory 10 connected to a CPU 9 calculating a root- mean-square value from the output of the photoelectric current sensor 2. The CPU 9 calculates the root-mean-square value from the output of the photoelectric current sensor 2, linearly corrects it with the correction equation, and temperature-corrects it with the temperature detected by an attached temperature sensor. An accurate measurement value is obtained without spending high cost for the improvement of the photoelectric current sensor 2 itself.</p> |
