摘要 |
<p>PURPOSE: To improve the steepness of the I-V characteristic of a nonlinear element. CONSTITUTION: A nonlinear resistance layer consisting essentially of zinc sulfide is formed by a sputtering method using an inert gas and gaseous oxygen as a sputtering gas, by which the nonlinear element consisting of a first electrode- nonlinear resistance layer-second electrode is produced. The steepness of the I-V characteristic 11 of the nonlinear element is made higher than the steepness of the I-V characteristic 12 of the nonlinear element in the case only the inert gas is used as the sputtering gas.</p> |