发明名称 DEVICE FOR DETECTING BOARD INSIDE CASSETTE
摘要 <p>PROBLEM TO BE SOLVED: To provide a device for detecting a board inside a cassette which can detect the presence or absence of a board inside a cassette and also detect the insertion of the board into the stepped groove of the cassette. SOLUTION: In this device for detecting a board inside a cassette, a slit groove corresponding to a groove inside a cassette is provided to a slit member. A slit sensor to detect a slit groove outputs a signal corresponding to the slit groove. A board detecting sensor, which emits a light into the cassette and outputs a signal according to light reception and light shielding, moves synchronizing with the slit sensor. Boards are normally inserted into grooves of groove numbers 1, 4 and 6 in the cassette, boards are inserted stepped into grooves of groove numbers 2 and 3, and no board is inserted into a groove of groove number 5. The turning-on or turning-off of an output signal of a board detecting sensor is detected at the rising and falling point of an output of the slit sensor. Thus, the presence or absence of the board, abnormal insertion, or gapped state in each of the grooves inside the cassette can be judged.</p>
申请公布号 JP2000294617(A) 申请公布日期 2000.10.20
申请号 JP19990099956 申请日期 1999.04.07
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SHIMIZU YOSHIO;YASUI HIROYUKI;SEZAKI YOSHIISA
分类号 H01L21/67;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/67
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