| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treating device capable of reducing the space between movable value sheets and miniaturizing the device. SOLUTION: Long stroke valve opening and closing mechanisms 30 and short stroke valve opening and closing mechanisms 31 are mutually arranged around the rotary shaft center O of a rotary table 15. The advancing-retreating stroke of movable value sheets 26 by the long stroke valve opening and closing mechanisms is longer than the advancing-retreating stroke of the short stroke valve opening and closing mechanisms 31. At the time of closing the plural opening parts 1a and 2a by the plural movable value sheets 26, after the operation of the short stroke value opening and closing mechanisms 31, the long stroke valve opening and closing mechanisms 30 work. On the other hand, at the time of changing the closed condition of the plural opening parts 1a and 2a by the plural movable valve sheets 26 to the opened one, after the operation of the long stroke valve opening and closing mechanisms 30, the short stroke valve opening and closing mechanisms 31 operate. |
