| 摘要 |
PROBLEM TO BE SOLVED: To transfer semiconductor products efficiently and economically by providing a transfer system provided with a supply system, which travels at the same height as a loading/unloading station in a clean room and which is positioned above the walking height of an operator. SOLUTION: A supply system composed of a roller conveyor 4 travels above the walking height of an operator and at the same height of a loading/unloading station 6, so that the operator can move freely on a floor 7 of a clean room, under the roller conveyor 4. All loading/unloading stations 6 are positioned at the same height on the floor 7 of the clean room, and in this case the height is three meters in general. The roller conveyor 4 travels immediately in front of each loading/unloading station. |
