| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a substrate from being damaged by suppressing the electrostatic charge of the substrate when the substrate is sucked by a heat treatment plate, when the substrate is peeled from the heat treatment plate, or when the substrate is heat treated. SOLUTION: Four product substrates are finally obtained out of a glass substrate 27, and the glass substrate has four effective areas. A suction hole 22 for sucking the glass substrate is provided in an area not corresponding to the effective areas of the glass substrate 27 and its vicinity thereof out of a substrate placement surface of a cooling plate 23, for example, only in a center part of the substrate placement surface, and only the center part of the glass substrate 22 is sucked. A lift pin 41 is provided on the cooling plate 23 corresponding to the outside and the center of the effective areas of the glass substrate 22.</p> |
