| 摘要 |
PROBLEM TO BE SOLVED: To obtain a super-narrow-band fluorine laser device by which the wavelength width of 1-2 pm, for example wavelengthλ1=157.6299 nm of an oscillation beam of laser light of a fluorine laser can be reduced up to the order of 0.2 pm and the wavelength of the laser light can be stabilized at the same time. SOLUTION: A set angle of an etalon 15 is finely adjusted in order that laser light L13 transmits through the etalon 15 at the maximum. Namely, results of a power monitor 18 is notified to a control device 20 through a signal line 19a in such a way that the laser light L13 is received always at the maximum intensity. The control device 20, upon receipt of the notice, transmits signal for finely adjusting a turning stage 16 through the signal line 19b, then the set angle of the etalon 15 is finely adjusted in accordance with the rotation of the rotation stage 16. |
