| 摘要 |
PROBLEM TO BE SOLVED: To uniformly apply an adhesive to the periphery of an open part by arranging recesses zigzag at a plurality of open parts on a joined face of one member having the plurality of open parts formed therein. SOLUTION: A plurality of open parts 42 as channel holes are arranged at one member 41, and recesses 43 are formed zigzag with respect to the open parts 42 on a joined face of the member 41 to the other member. The recesses 43 and open parts 42 are equal in shape and size. A distance (d) between the open part 42 and recess 43 in a direction orthogonal to an arrangement direction of the recesses 43 is not smaller than approximately 50μm to secure a bond margin and nor larger than approximately 100μm for the recesses 43 to trap and secure an adhesive layer. When the one member 41 is formed of a stainless steel material, the open parts 42 and recesses 43 can be formed simultaneously by photolithography or spray type wet etching.
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