| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily generate hydroplaining phenomenon and improve substitution efficiency of slurry by rotating a brush wherein a groove is formed in a bottom at a high speed. SOLUTION: In a brush 16, a groove 20 is formed in a brush bottom 19 of a contact surface between the brush 16 and a wafer 11. The groove 20 of the brush 16 is formed in the direction to take in water on the wafer 11 and the groove 20 is wide in a peripheral part and is narrow as it gets closer to a central part. A round groove is shaped in a groove central part 21. Therefore, particle depositing on the wafer 11 is removed as the brush 16 scans the wafer 11. During scanning, the brush 16 is subjected to a high speed rotation (at least hundreds of turns/minute) to make pure water enter the brush bottom 19 by means of the brush 16 and the groove 20. As a result, the brush bottom 19 becomes positive pressure and the brush 16 rises.</p> |
