PROBE CARD FOR ARRANGING HOLLOW TYPE PROBE TIP TO VERTICAL DIRECTION

摘要

PURPOSE: A probe card for arranging a hollow type probe card to a vertical direction is provided to test the electric characteristic of a testing object such as a semiconductor device by providing elasticity to a probe tip. CONSTITUTION: A guide plate(52) is fixed to a center portion of a lower face of a multi-layer printed circuit substrate(51). A hole(52a) is formed in the guide plate(52). A pogo pin(56) is connected electrically with the multi-layer printed circuit substrate(51) through the hole(52a). A support plate(58) is located in an edge portion of a lower face of the guide plate(52). A relay plate(60) is fixed to the guide plate(52). The relay plate(60) has a contact point(60a) connected with the pogo pin(56). A plurality of hole(60b) is arranged on the relay plate(60). A hollow type auxiliary probe tip(62) is connected with a contact point(60a) formed in the relay plate(60). A fixing plate(66) is fixed by a lower face of the relay plate(60). A plurality of hole(66a) is arranged on the fixing plate(66). An upper portion of a hollow type probe tip(68) is connected with the hollow type auxiliary probe tip(62). A lower portion of the hollow type probe tip(68) is connected with an electrode pad. A reinforcing plate(70) is used for preventing distortion of the guide plate(52), the support plate(58), the fixing plate(66), and the multi-layer printed circuit board(51).