发明名称 THIN FILM TRANSISTOR
摘要 <p>PROBLEM TO BE SOLVED: To obtain a top gate stagger-type thin film transistor(TFT) which is simple in structure and capable of decreasing a leakage current. SOLUTION: A semiconductor layer 100, insulating layers 106 and 106A, and a gate electrode 107 are successively formed on a source electrode 102 and a drain electrode 103 arranged on a substrate 101, where the semiconductor layer 100 is a laminated structure composed of an amorphous silicon layer 104 and a polycrystalline silicon layer 105 formed on the silicon layer 104. Furthermore, the amorphous silicon layer 104 is specified in thickness to the polycrystalline silicon layer 105.</p>
申请公布号 JP2001077372(A) 申请公布日期 2001.03.23
申请号 JP19990254905 申请日期 1999.09.08
申请人 CANON INC 发明人 TOKUNAGA HIROYUKI
分类号 H01L29/786;G02F1/136;G02F1/1365;G02F1/1368;(IPC1-7):H01L29/786 主分类号 H01L29/786
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