SYSTEM AND METHOD FOR AUTOMATING SEMICONDUCTOR FACTORY FOR CONTROLLING MEASUREMENT EQUIPMENT MEASURING SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To reduce overload caused by an equipment server by controlling a measurement means through the use of a measurement recipe and an instruction, which are directly inputted from an operator. SOLUTION: An operator interface 201 transmits a measurement recipe, a semiconductor wafer cassette identifier and an instruction, which are directly inputted from an operator, to measurement equipment 204. The instruction includes a control signal controlling measurement equipment 204 and contains a control instruction. The control instruction contains a communication mode conversion instruction. Data collection sever 207 collects measurement data. A real time data base 300 stores measurement data on a real time basis. The operator loads a semiconductor wafer cassette on measurement equipment 204, compares measurement data with reference data and judges whether measurement data is adapted or not. It is reported to measurement equipment 204 whether data is adapted or not.