| 摘要 |
<p>The invention relates to a device (1; 1a; 1b) for loading and unloading of substrates using a conveyor device (83; 3a; 3b) which is used to convey a substrate in a linear manner comprising at least one handling facility which can be rotated (4, 5; 4a) and which is intended for the transport of said substrate between said conveyor device (3; 3a; 3b) and at least one process station (6A to D, 7A to D; 80A to H) wherein a small number of components are used and a small amount of space is taken up when the conveyor device (3; 3a; 3b) is arranged between at least two process stations (6A to D, 7A to D; 80A to H) and the at least one handling facility (4, 5; 4a) above said conveyor device (3; 3a; 3b).</p> |
