| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a suction pad eliminating a need of replacement even when the sizes of ICs are different from each other. SOLUTION: A suction pad 20 is formed so that sucking parts 20a and 20b of different sizes are formed integrally and concentrically with a nozzle 3. The sucking parts 20a and 20b are formed generally in hollow conical body, and the inside diameter of the sucking part 20b is formed larger than the outside diameter of the sucking part 20a. The amount of projection of the bottom surface of the sucking part 20b from an IC1 is larger than the amount of projection of the bottom surface of the sucking part 20a from the IC1.</p> |
