| 摘要 |
PROBLEM TO BE SOLVED: To make a device small-sized and inexpensive. SOLUTION: A base substrate 21 made of a material with a small coefficient of thermal expansion is provided with a support part 22 made of a material with a small coefficient of thermal expansion, the support part 22 is fitted with a parallel flat plate 23, which is provided with a high reflection film 23; and the parallel flat plate 23 is fitted with an actuator 25, which is fitted with a parallel flat plate 26. The parallel flat plate 26 is provided with a high reflection film 27, and the base substrate 21 is fitted with an integration type displacement sensor 28 for detecting the position of the high reflection film 27. |
