| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cassette for a substrate which supports a substrate in a substantially horizontal position with a shelf piece projected from a support and can house a plurality of substrates on many stages and with which reciprocal movement of the substrate in a housed state can be reliably regulated without attaching a separate stopper to both sides of an opening, the substrates can be put in and out and costs can be reduced. SOLUTION: A shelf piece 4 on both sides of a support 3 positioned in front is constituted by providing an end of a metallic support pin 8 with an end cover 9 of organic polymer material having a support portion 9A for supporting the lower surface of a substrate B and a stopper portion 9C which extends forward from the support portion and has a stopping piece 9D projected at a front end.</p> |
