| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrosion-resistant member using an aluminum alloy group with the weight hardly changed due to corrosion even when exposed to a halogenous corrosive gas and its plasma at high temperatures. SOLUTION: This corrosion-resistant member is formed from an aluminum alloy, and the alloy contains 0.01-100 mass ppm each of silicon, iron, titanium and copper as the alloy components, 0.1-50 mass ppm carbon, <=1,000 mass ppm magnesium and <=20 mass ppm each of other metallic elements, and the total content of the other metallic elements is controlled to <=50 mass ppm. A deposit containing a metal selected from the group consisting of silicon, iron, titanium and copper and having >=1μm diameter is not present in an optional 50×40μm region on the member surface.
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