TEMPERATURE CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To solve a problem such that a long time is required for controlling the temperature of an object into target temperature. SOLUTION: This object is held at a position proximate to a regenerative substrate controlled in the temperature so as to have a prescribed temperature different from the target temperature, and the temperature on the surface of the object is controlled into target temperature in the middle of the relevant temperature and the temperature of the regenerative substrate.