| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an accurate and low-cost positioning apparatus, for vacuumizing which can be easily put in practical use while avoiding deterioration of the positioning accuracy of a static bearing. SOLUTION: The positioning apparatus includes guides 5b and 5a which movably guide (x) and (y) stages 4 and 5 as moving members on a base 6. Above the (x) and (y) stages 5 and 5, a vacuum chamber 3 defined by a vacuum container member 2 is provided. Static bearings 7b and 8b are provided at contact parts between the stages 4, 5 and guides 5b, 5a, the static bearing parts of the stages 4 and 5 are positioned outside the vacuum chamber 3, a labyrinth of grooves 13 and 14 are provided at an interface of the chamber 3 and the outside thereof as a seal structure for cutting off the atmospheric pressure. The chamber 3 is sealed against the atmospheric pressure by vacuumizing the labyrinth with use of a vacuum pump.</p> |
