| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a spin chuck capable of hardly forming swell and warpage on the upper side of a discoidal portion 3 of a resin spin chuck or the upper side of protrusions 5, 6 to bring an excellent accuracy in size at a low cost. SOLUTION: The spin chuck used for rotatably supporting the base of a rotatable processing apparatus is formed in a gate structure from its center.</p> |
