| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of accurately controlling thickness when a fine structural body is formed by pattern transfer and of manufacturing a high-quality device with a high yield and at a low cost. SOLUTION: A preliminary process for forming a resin layer 35a by spin- coating a resin agent 35 before forming a support structure of an optical element on a surface 34a of a sacrifice layer 34 for forming an actuator 6 is provided. Thereby, the resin layer 35a having a uniform thickness can be formed on the surface 34a of the board 20a before pressing a transfer pattern, so that the accuracy of thickness can be improved. Since the need of the force for expanding the resin agent 35 is obviated, the pressure required for pattern transfer can be reduced to around one tenth. Thereby, balance can easily be secured, the distortion or the like of the transfer pattern in pressing it can be eliminated, film thickness control can easily be achieved and the yield can be improved. |
