发明名称 METHOD FOR ALIGNING LASER BARS
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for aligning laser bars simply, quickly and skillfully, irrespective of warpage of the laser bars and resiliency which is caused by the warpage. SOLUTION: By the negative pressure of negative suction holes, the laser bars and spacers are adsorbed to suction ports of the holes, and positions and attitudes of the laser bars and the spacers are stabilized, so that the laser bars and the spacers are pressed against a stopper and not pushed back.</p>
申请公布号 JP2001320119(A) 申请公布日期 2001.11.16
申请号 JP20000133162 申请日期 2000.05.02
申请人 OPUTO SYSTEM:KK 发明人 KIKUCHI SHUGO
分类号 H01L21/683;H01L21/68;H01S5/02;(IPC1-7):H01S5/02 主分类号 H01L21/683
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