| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser device which can improve precision of optical exposure and optical working by making energy of the whole pulses in continuous pulse oscillation always uniform. SOLUTION: In this laser device, a corrected discharge voltageΔVi is defined byΔVi = function f(ΔE). Pulse energy deviationΔE is compared with a previously set threshold value (±ΔEth). When -ΔEth<ΔE andΔE<ΔEth,ΔVi=G1*ΔE is adopted. When +ΔEth<=ΔE,ΔVi=G1*ΔEth+G2*(ΔE-ΔEth) is adopted. When -ΔEth>=ΔE,ΔVi=G1*(-ΔEth)+G2*(ΔE+ΔEth) is adopted. Discharge voltage data Vi are corrected by using the corrected discharge voltageΔVi which is adopted. |
