METHOD FOR SCRIBING BRITTLE MATERIAL, SCRIBING HEAD AND SCRIBING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a scribing method neither causing a crosspoint skip by controlling a swinging range of a chip holder when carrying out a cross scribing, nor failing in the formation of a scribing line, and to provide a scribing head and a scribing apparatus. SOLUTION: The chip holder is controlled during scribing to make the rocking range >0 deg. and <=2 deg..