| 发明名称 |
THIN FILM TRANSISTOR AND LIQUID CRYSTAL DISPLAY DEVICE AS WELL AS ITS MANUFACTURING METHOD |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a TFT and an LCD having low off current Ioff and a low S value and a good symmetry of Vths of a p-type TFT and an n-type TFT. SOLUTION: A method for manufacturing this TFT comprises a step of forming a substrate film 2 on a board 1, a step of heating the substrate film at 500 deg.C or higher, and a step of forming a silicon film 30a for forming a transistor on the heated substrate film.</p> |
| 申请公布号 |
JP2001332739(A) |
申请公布日期 |
2001.11.30 |
| 申请号 |
JP20000152882 |
申请日期 |
2000.05.24 |
| 申请人 |
MITSUBISHI ELECTRIC CORP;SEIKO EPSON CORP |
发明人 |
TAKANABE SHOICHI;HAYASHI MASAMI;KOMATSU NORIKAZU |
| 分类号 |
G02F1/136;G02F1/1368;H01L21/20;H01L21/302;H01L21/3065;H01L21/336;H01L29/786;(IPC1-7):H01L29/786;H01L21/306 |
主分类号 |
G02F1/136 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
