METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide substrate which prevents the intrusion of impurities into an optical waveguide substrate to be manufactured by a steam oxidation method having high safety and can thickly oxidize the surface of silicon by suppressing the consumption of energy to a lower level. SOLUTION: In the method for manufacturing the optical waveguide substrate by forming a quartz glass film on the heated silicon 1 by exposing the silicon to steam and oxidizing the silicon, the steam generated by causing the molecular vibration of continuously replenished pure water of about room temperature at the highest by microwaves is supplied to the silicon.