| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the carrying system of a body to be processed and the detection method of the position deviation amount of the body to be processed capable of detecting the position deviation amount of the body to be processed even when the carrying device does not stand still at a prescribed position. SOLUTION: The carrying system 100 is provided with two wings 154, 156 provided on the mounting part 152 of a wafer, and a storage means for storing a distance between a corresponding reference part and the wafer at a normal position in the detection ranges 170, 172 of a line sensor. The position deviation amount of the wafer is detected from the distance between the corresponding reference part and the numeral 2 of the wafer in each detection range measured by the stored distance of the numeral 2 and the line sensor. The wing is movably provided together with a carrying arm 150, and the position deviation amount of the wafer is detected as a coordinate making the carrying arm a reference. Thus, even when the carrying arm does not stand still at the prescribed position, the position deviation amount of the wafer can be detected.</p> |
