| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge excitation gas laser equipment where adverse effects of acoustic wave is removed only by regulating positional relationship between a discharge region and a laser chamber inside wall. SOLUTION: The discharge excitation is provided with a laser chamber 1 in which laser gas that is excited by pulse discharge is sealed up, and a pair of long discharge electrodes 3 and 4 which are provided parallel in face to face with each other, in the laser chamber 1, with a long discharge region A formed between them for repeated pulse discharge at 2 kHz or above. Here, the acoustic wave, which is generated last or last but one in the discharge region A pulse discharge and reflected on the inside wall nearest to the discharge region A on each side of the laser chamber inside wall opposite to each side surface of the discharge region, is not present structurally in the discharge region A at a current pulse discharge. |
