| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method by which an optical waveguide is precisely patterned by suppressing a warp of a substrate in the method for manufacturing optical waveguide device where a resin made optical waveguide is mounted on an inorganic material substrate. SOLUTION: As a first process, a lower clad layer 3 is formed by using resin on the upper surface of the inorganic material substrate 1. As a second process, a resin layer for the optical waveguide is further laminated on the lower clad layer 3. As a third process, the resin layer for the optical waveguide is patterned into the shape of the desired optical waveguide 4. A rear surface resin layer 30 is formed on the rear surface of the substrate in order to negate a stress imparted to the substrate 1 by the lower clad layer 3 and the resin layer for the optical waveguide before the first process, after the first process and before the second process or after the second process and before the third process. |
