| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for probe, with which probing can be performed while exactly aligning the electrode of each of chips to be examined of a specimen and the probe needle of a probe card without being affected by an error when moving a stage or position deviation of electrodes of each of chips to be examined of the specimen. SOLUTION: By means of a stage move error correction value previously acquired and stored for correcting a move error when moving an examination stage 2 and a chip-to-be-examined position deviation correction value, which is acquired by scaling the coordinates of each of chips to be examined from a reference point on the examination stage 2 while utilizing the image of the pattern of a plurality of selected chips to be examined, for correcting the position deviation of the pad of each of chips to be examined of a specimen 1 from this reference point, the move error of the examination stage 2 and the position deviation of each of chips to be examined are corrected. Thus, the pad of each of chips to be examined of the specimen 1 can be exactly aligned and contacted to a probe needle 6 of a probe card 7 in probing.
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