| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage mechanism capable of removing the vibration component in straightness accompanied by stage motion and correcting the straightness in nanometer order with a fine motion stage. SOLUTION: A damper mechanism 11 working on a Y-stage drive shaft 10 in vertical direction is arranged. The damper mechanism 11 is constituted of PZT12 flexibly extendable in vertical direction and a damper member 13 fixed at the tip end of the PZT12. For the damper member 13, a high stiffness vibration deadening material made of high polymer or rubber and the like are used.</p> |
