DEVICE FOR MOUNTING TWO-DIMENSIONAL PLANE MOTOR

摘要

PURPOSE: A device for mounting a two-dimensional plane motor is provided to smoothly mount a movable element on a sensor plate using a check valve and an air storage part when the movable moving on the sensor plate is rapidly stopped or air isn't injected through an air inlet port, thereby preventing the damage of the sensor plate due to the impulse between the sensor plate and the movable element. CONSTITUTION: A sensor plate(12) is assembled to a fixed element plate(11). A central first air inlet port(22) and a plurality of second air inlet ports(23) are formed in a movable element(20). The second air inlet ports(23) are connected to the first air inlet port(22) to inject air toward respective corners, thereby being acted as an air bearing. A check valve(31) is connected to the first air inlet port(22) and an air supply tube(32) to open/close the first air inlet port(22). An air storage part(32) is connected to the air supply tube(32) between the first air inlet port(22) and the check valve(31) to store air supplied through the check valve(31) and supply stored air to the first air inlet port(22) when air supply is temporarily stopped.