| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for controlling the diameter of a graphite nanofiber which can be used as a carbon based electron emmision source. SOLUTION: A substrate obtained by forming a catalytic metallic thin film of Fe, Co or an alloy containing at least one kind of those metals on the surface of a glass substrate or an Si substrate so as to have a thickness of 10 to 50 nm in prescribed patterns or the substrate to be treated which has a noncatalytic metallic thin film formed under the catalytic metallic thin film in prescribed patterns is subjected to heat treatment in a vacuum, thereafter, a carbon- containing gas or gaseous hydrogen are introduced into the vacuum chamber from a position lower than the position where the substrate is placed, the pressure in the chamber is kept to almost one atmospheric pressure, and graphite nanofiber is grown only on the pattern parts on the substrate by a thermal CVD process.</p> |
