| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately drive an end effector at a high speed. SOLUTION: A bearing unit 60a has fork parts 64a and 64b pivoted on a shaft part 66 via bearings 68a and 68b. Rods 58a and 58b of an actuator part for forming a pair of leg parts are connected to the fork parts 64a and 64b. A universal joint part 70 composed of a spherical bearing is arranged in a lengthwise directional central part of the shaft part 66, and a connecting projection part 72 of a moving table 14 is installed in this universal joint part 70.
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