发明名称 DIP COATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a dip coating apparatus, of which the diameter of a coating vessel, the height of a vapor layer and the diameter of an opening part of coating vessel upper cap, through which a cylindrical substrate is passed freely adjustable, and which gives a uniform film thickness on the whole surface of a substrate. SOLUTION: A vapor layer height adjusting ring 5 and the coating vessel 6 are installed on a coating vessel receiving hole 2 and a coating vessel upper cap opening diameter adjusting disk 4 is installed on the coating vessel upper cap 1. The upper end of the coating vessel 6 is formed to be bevel-shaped so that the overflowed coating liquid flows gently and falls down to a liquid receiving pan 3.
申请公布号 JP2002131948(A) 申请公布日期 2002.05.09
申请号 JP20000329439 申请日期 2000.10.27
申请人 RICOH CO LTD 发明人 KUBOTA TATSUYA
分类号 G03G21/00;B05C3/09;B05D1/18;B05D7/00;G03G5/05;(IPC1-7):G03G5/05 主分类号 G03G21/00
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