发明名称 METHOD OF FORMING PIXEL ELECTRODE OF FRINGE FIELD SWITCHING LIQUID CRYSTAL DISPLAY
摘要 PURPOSE: A method of forming a pixel electrode of a fringe field switching liquid crystal display is provided to prevent an amorphous ITO thin film from being locally crystallized by eliminating a hard baking process of crystallizing the ITO thin film. CONSTITUTION: A photoresist is coated on an amorphous ITO thin film. The photoresist is baked at a temperature ranging from -10 degrees to 90 degrees. The baked photoresist is exposed. The exposed photoresist is developed. The developed photoresist is baked at a temperature ranging from 90 degrees to 120 degrees. The photoresist is coated by 0.5 to 1 micrometers. The amorphous ITO thin film has the thickness of 200-2000 angstrom.
申请公布号 KR20020042923(A) 申请公布日期 2002.06.08
申请号 KR20000072282 申请日期 2000.12.01
申请人 HYUNDAI DISPLAY TECHNOLOGY INC. 发明人 CHO, JIN HUI;LEE, GYO UNG;LIM, SEUNG MU
分类号 G02F1/136;(IPC1-7):G02F1/136 主分类号 G02F1/136
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