| 摘要 |
A surface position detecting method wherein an object having a region with a pattern structure is relatively scanned relative to surface position detecting means and wherein surface position at plural detection points in the region is detected by use of the surface position detecting means, the method includes detecting an error in the detecting by the surface position detecting means, with respect to each of the detecting points, which error may result from a difference in pattern structure among the detection points, detecting, in synchronism with relative position of the object and the surface position detecting means, the surface position at each of the detection points by use of the surface position detecting means, and correcting the detected surface position on the basis of the error.
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