发明名称 |
Process and apparatus for blending and distributing a slurry solution |
摘要 |
On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.
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申请公布号 |
US2002085447(A1) |
申请公布日期 |
2002.07.04 |
申请号 |
US20010779470 |
申请日期 |
2001.02.09 |
申请人 |
SNYDER DAVID L.;URQUHART KARL J.;SWINDELL RICHARD |
发明人 |
SNYDER DAVID L.;URQUHART KARL J.;SWINDELL RICHARD |
分类号 |
B01F3/12;B01F7/00;B01F15/02;B01F15/04;B24B37/04;B24B57/02;H01L21/304;(IPC1-7):B01F15/04 |
主分类号 |
B01F3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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