| 摘要 |
PROBLEM TO BE SOLVED: To provide a copper complex for MOCVD that is easily vaporizable with high vapor pressure, easily controllable in formation rate of copper film and stable at high temperature. SOLUTION: Stabilized copper complex having general formula 1 produced by reactingβ-ketimine ligand and a copper (I) compound in the presence of an electron donating compound of general formula (1) (R1 or R2 is a 1-20C fluorohydrocarbon group or 1-20C hydrocarbon group, and at least either R1 or R2 is the fluorohydrocarbon group. R3 is H, F or a 1-20C fluorohydrocarbon group. R4 is a 1-20C fluorohydrocarbon group, 1-20C hydrocarbon group or H. L is an electron donating compound such as an unsaturated hydrocarbon which may contain a hetero atom, either, silyl ether, phosphine or amine).
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