| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus in which generation of particles or the like is suppressed by eliminating mechanical contacts in electrical wiring systems. SOLUTION: This heat treatment apparatus 22 is constituted such that a loading pedestal 58 having a built-in resistance heating means 60 is held rotatable by a rotary axis 44 in a treatment chamber 24, which can be evacuated to form a vacuum. A predetermined heat treatment is carried out on an object to be treated while the object is loaded on the rotating loading pedestal. A rotary contact means 46, inside of which an electrically conductive fluid is sealed for each electrical path, is provided in the rotary axis, and feeder lines 62 for the resistance heating means are installed via the rotary contact means. Mechanical contacts in electrical wiring systems are thereby eliminated, and generation of particles or the like is suppressed.</p> |
