发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To raise the heat dissipation characteristics of a semiconductor device without hindering a miniaturization of the device. SOLUTION: A semiconductor device is constituted in a structure that heat generated in a heating element layer 5 is dissipated to a substrate 1 through plugs 7 and 17, wiring layers 8 and 18 and plugs 9 and 19. The sectional shape of the plugs 7, 9, 17 and 19 provided along the main surface of a substrate 1 is set into a rectangle and the long sides of the rectangle are formed along the direction intersecting orthogonally to the direction connecting one end of the layer 5 with the other end of the layer 5. N-type semiconductor layers 3 and 13 are interposed between the plugs 9 and 19 and a p-type semiconductor layer 2.
申请公布号 JP2002231721(A) 申请公布日期 2002.08.16
申请号 JP20010029807 申请日期 2001.02.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMAGUCHI YASUO
分类号 H01L21/76;H01L21/3205;H01L23/367;H01L23/433;H01L23/52;H01L29/786;(IPC1-7):H01L21/320 主分类号 H01L21/76
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