发明名称 RESIST PEELING AGENT
摘要 PROBLEM TO BE SOLVED: To provide a resist peeling agent which shows excellent resist stripping property and does not corrode copper. SOLUTION: The peeling agent is used to peel a resist used for the copper wiring process and contains N-alkylmorpholine as the essential component.
申请公布号 JP2002236376(A) 申请公布日期 2002.08.23
申请号 JP20010033417 申请日期 2001.02.09
申请人 TOSOH CORP 发明人 HARA YASUSHI;HAYASHI HIROAKI
分类号 G03F7/42;H01L21/027;H01L21/308;(IPC1-7):G03F7/42 主分类号 G03F7/42
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