APPARATUS FOR TRANSFERRING WAFER FROM WAFER CARRIER TO LOADLOCK CHAMBER

摘要

PURPOSE: An apparatus for transferring a wafer from a wafer carrier to a loadlock chamber is provided to minimize a space occupied by the wafer transfer apparatus and to transfer the wafer loaded into a front open unit pot(FOUP) at once, by transferring a loadlock cassette installed in the FOUP or the loadlock chamber. CONSTITUTION: An open unit exposes the wafer to the exterior in the FOUP(30) into which a plurality of wafers are loaded. A switching unit switches the loadlock chamber(38) including a loadlock cassette(42) for supporting the plurality of wafers. A transfer unit positions the wafer loaded into the FOUP and the loadlock chamber so that the wafer and the loadlock chamber corresponds to each other. The first drive unit settles the wafer in the loadlock cassette.