发明名称 |
Semiconductor acceleration sensor |
摘要 |
A semiconductor sensor chip is provided with a weight portion supported in a frame via beams whereby acceleration up to substantially ±1 G can be detected by utilizing piezoresistance effect of resistor elements formed on the beams. The semiconductor sensor chip is supported by a seat having a thermal expansion coefficient equivalent to that of the semiconductor sensor chip via the frame. The frame and the seat are adhered to each other by a flexible adhesive agent mixed with a plurality of resin beads functioning as spacers and under an adhesion state, air damping of the weight portion is carried out by setting a dimension of an air gap between the weight portion and the seat to a range of 7 through 15 mum.
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申请公布号 |
US6448624(B1) |
申请公布日期 |
2002.09.10 |
申请号 |
US19970908939 |
申请日期 |
1997.08.08 |
申请人 |
DENSO CORPORATION |
发明人 |
ISHIO SEIICHIRO;AO KENICHI;MURATA MINORU;SHIMOYAMA YASUKI;KUNDA TOMOHITO;KITAO NORIO |
分类号 |
B81B3/00;B81B7/00;G01P1/00;G01P15/08;G01P15/12;(IPC1-7):H01L29/82 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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