| 摘要 |
PURPOSE: A lateral-type microelectromechanical systems(MEMs) switch is provided to prevent stiction, release of a sacrificial layer, a high driving voltage and unstability of a device in a conventional membrane-type device, by fabricating the MEMs switch in a single pole double throw(SPDT)-type switch. CONSTITUTION: Signal lines are formed on a semiconductor or dielectric substrate(11). Radio frequency(RF) grounds(12) are formed in the periphery of the signal lines on the substrate, isolated from the signal line. Anchors(22) are formed between the signal lines on the substrate. A transfer plate(17) is separated from the upper portion of the substrate, supported by the upper portion of the anchors. Transfer members(20,21) are connected to the transfer plate, interposed between the signal lines. Driving units(18,19) are formed on the substrate, separated from the transfer plate. The driving units transfer the transfer plate when a voltage is applied, and make the transfer member contact the signal line.
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