| 摘要 |
<p>A connecting layer for interconnecting fluid control devices in series and in parallel comprises an upper connecting layer 4 and a lower connecting layer 5. The upper connecting layer 4 is provided by parallel rows each comprising block couplings 41, 42, 43, 44 arranged longitudinally of the apparatus, each of the block couplings having a longitudinal channel 61 for interconnecting the adjacent fluid control devices in the row and a through channel 62 communicating with the fluid control device. The lower connecting layer 5 is provided by block coupling 56, 57, 58 each having a lateral channel 64 for interconnecting the through channels 62 of the block couplings 41, 42, 43, 44 of the upper connecting layer 4 which are arranged laterally and by block couplings 51 each adapted to cause the through channel 62 of the block coupling 41, 43, 44 of the upper connecting layer 4 to communicate with an inlet-side or outlet-side coupling 52, 53. The couplings 51,56, 57, 58 of the lower connecting layer 5 are attached to a base plate 2 with screws from above, and the couplings 41, 42, 43, 44 of the upper connecting layer 4 are attached to the couplings 51, 56, 57, 58 of the lower connecting layer 5 with screws form above.</p> |
