METHOD AND DEVICE FOR TREATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To prevent the soiling and clogging of a carrier roller and a bearing part in removing the deposit such as a treatment liquid attached to a substrate by preventing the deposit from directly splashing on the carrier roller and the bearing part. SOLUTION: The substrate 2, which is surface-treated with a treatment liquid and carried in the horizontal posture on plural carrier rollers 6a disposed horizontally and parallel, is inclined backward at a prescribed angle by raising the front end in the carrying direction upward. As a result, the deposit attached to the surface of the substrate 2 such as the treatment liquid or separated material is made to flow down from the rear end side of the substrate 2 and removed. After that, the substrate 2 is returned to the horizontal posture and carried on the carrier rollers 6a to a next process.