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发明名称
VERFAHREN ZUR ERZEUGUNG EINER STRUKTUR UND VERFAHREN ZUM VORBEREITEN EINER HALBLEITENDEN ANORDNUNG MIT HILFE DIESES VERFAHRENS
摘要
申请公布号
AT229229(T)
申请公布日期
2002.12.15
申请号
AT19950203233T
申请日期
1991.05.08
申请人
CANON KABUSHIKI KAISHA
发明人
YAGI, TAKAYUKI;KOMATSU, TOSHIYUKI;SATO, YASUE;KAWATE, SHINICHI
分类号
G03F1/08;G03F1/14;G03F7/16;H01L21/308;H01L21/311;H01L21/3213;(IPC1-7):H01L21/033;H01L21/321
主分类号
G03F1/08
代理机构
代理人
主权项
地址
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