发明名称 METHOD FOR MANUFACTURING GAS DISCHARGE PANEL
摘要 PROBLEM TO BE SOLVED: To prevent moisture and carbon dioxide gas from infiltrating into a panel as impurities from a film adhering moisture and carbon dioxide gas, in a case of a protective film made of magnesium oxide in a gas discharge panel starting with a PDP. SOLUTION: With the gas discharge panel, impurity gas is removed by beam irradiation into a MgO film. Also, as to quality of the MgO film, one with high electron emission power and high-level anti-sputtering property can be obtained, which not only reduces manufacturing processes and allows effective use of energy but also a high-quality and long-life PDP is manufactured.
申请公布号 JP2002358879(A) 申请公布日期 2002.12.13
申请号 JP20010166584 申请日期 2001.06.01
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 SHIOKAWA AKIRA;KODERA KOICHI;MIYASHITA KANAKO
分类号 C23C14/22;C23C14/34;H01J9/02;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/40;(IPC1-7):H01J9/02;H01J11/02 主分类号 C23C14/22
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