| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for producing crystal films of KTa1-x Nbx O3 and K1-y Liy Ta1-x Nbx O3 by a CVD method. SOLUTION: The method for producing crystal films having a composition of KTa1-x Nbx O3 (0<x<1) comprises introducing aβ-diketone complex of K, expressed by general formula I, wherein R is a 1-7C alkyl and R' is an alkyl group or a group expressed by Cn F2n+1 (n is 1 to 3), as a first starting material, at least one of gaseous Ta compounds and vaporizable compounds of Ta, as a second starting material, at least one of gaseous compounds of Nb and vaporizable compounds of Nb, as a third starting material and an oxygen containing gas as an oxidant to a reaction system, as each gas flow, in which a substrate is provided, and reacting these components in a vapor phase or on the substrate so as to form the crystal of KTa1-x Nbx O3 on the substrate.</p> |
